JPH01119054U - - Google Patents
Info
- Publication number
- JPH01119054U JPH01119054U JP1114788U JP1114788U JPH01119054U JP H01119054 U JPH01119054 U JP H01119054U JP 1114788 U JP1114788 U JP 1114788U JP 1114788 U JP1114788 U JP 1114788U JP H01119054 U JPH01119054 U JP H01119054U
- Authority
- JP
- Japan
- Prior art keywords
- container
- target
- substrate
- sputtering device
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1114788U JPH01119054U (en]) | 1988-02-01 | 1988-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1114788U JPH01119054U (en]) | 1988-02-01 | 1988-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01119054U true JPH01119054U (en]) | 1989-08-11 |
Family
ID=31219441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1114788U Pending JPH01119054U (en]) | 1988-02-01 | 1988-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01119054U (en]) |
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1988
- 1988-02-01 JP JP1114788U patent/JPH01119054U/ja active Pending